J. Provine

Adjunct Professor


Publications

M. J. Sowa, Y. Yemane; J. Zhang, J. C. Palmstrom, L. Ju, N. Strandwitz, F. B. Prinz, J. Provine, “Plasma-enhanced atomic layer deposition of superconducting niobium nitride,” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Volume 35, Issue 1, Article 01B143, Jan-Feb 2017.

J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, and Fritz B. Prinz, “Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride”, AIP ADVANCES, vol. 6, pp. 65012-65012, 2016.

Yongmin Kim, J. Provine, Stephen P. Walch, Joonsuk Park, Witchukorn Phuthong, Anup L. Dadlani, Hyo-Jin Kim, Peter Schindler, Kihyun Kim, and Fritz B. Prinz, “Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid”, ACS APPL. MATER. INTERFACES, vol. 8 (27), pp. 17599-17605, 2016.

Yongmin Kim, Peter Schindler, Anup L. Dadlani, Shinjita Acharya, J. Provine, Jihwan An, Fritz B. Prinz, “Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation “, ACTA MATERIALIA, vol. 117, pp. 153-159, 2016.

Dickson Thian, Yonas T. Yemane, Manca Logar, Shicheng Xu, Peter Schindler, Martin M. Winterkorn, J Provine, and Fritz B. Prinz, “Atomically Flat Silicon Oxide Monolayer Generated by Remote Plasma”, JOURNAL OF PHYSICAL CHEMISTRY C, vol. 120 (15), pp. 8148-8156, 2016.

J Provine, P. Schindler, H.K. Kim, J. Torgersen, H.-P. Karnthaler, F.B. Prinz, “Atomic Layer Deposition by Reaction of Molecular Oxygen with Tetrakisdimethylamido-metal Precursors”, JOURNAL OF VACUUM SOCIETY OF AMERICA A, vol. 34, 2016.

M M Winterkorn, A L Dadlani, Y Kim, J Provine, FB Prinz, “ETCH “sandbox”: Controlled release dimensions through atomic layer deposition etch stop with trench refill and polish”, 2015 TRANSDUCERS – 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), pp. 2272-2275, 2015.

Peter Schindler, Manca Logar, J Provine, and Fritz B. Prinz, “Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition”, LANGMUIR, vol. 31, pp. 5057-5062, 2015.

S. Dumpala, S.R. Broderick, U. Khalilov, E.C. Neyts, A.C.T. van Duin, J Provine, R.T. Howe, K. Rajan, “Integrated Atomistic Chemical Imaging and ReaxFF Molecular Dynamic Simulations on Silicon Oxidation”, APPLIED PHYSICS LETTERS, vol. 106, p. 11602, 2015.

W. Song, R. Gatdula, S. Abbaslou, M. Lu, A. Stein, W.Y.-C. Lai, J Provine, R.F.W. Pease, D.N. Chistodoulides, W. Jiang, “High-Density Waveguide Superlattices with Low Crosstalk”, NATURE COMMUNICATIONS, vol. 6, p. 7027, 2015.

M M Winterkorn, A L Dadlani, Y Kim, J Provine, FB Prinz, “ETCH “sandbox”: Controlled release dimensions through atomic layer deposition etch stop with trench refill and polish”, 2015 TRANSDUCERS – 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), pp. 2272-2275, 2015.

M. Javanmard, S. Emaminejad, C. Gupta, J Provine, R.W. Davis, R.T. Howe, “Application of Ultra-Dielectrophoresis (UDEP) to Sample Prepartion”, SENSORS & ACTUATORS B – CHEMICAL, vol. 193, pp. 918-924, 2014.

B. Park, I.W. Jung, J Provine, A. Gellineau, R.T. Howe, O. Solgaard, “Double-Layer Silicon Photonic Crystal Fiber Tip Sensor for Enhanced Temperature Measurement”, IEEE PHOTONIC TECHNOLOGY LETTERS, vol. 26, 2014.

W.M Tang, U. Aboudi, J Provine, R.T. Howe, H.-S.P. Wong, “Improved Performance of Bottom-Contact Organic Thin Film Transistor using Al Doped HfO2 Gate Dielectric”, IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. 61, 2014.

Z. Fang, X. P. Wang, B. B. Weng, Z. P. Zhang, Y. Z. Tang, G. Q. Lo, J Provine, S. S. Wong, H.-S. P. Wong, D. L. Kwong, “The Role of Ti Capping Layer in HfOx-Based RRAM Devices”, IEEE ELECTRON DEVICES LETTERS, vol. 35, pp. 912-914, 2014.

R.G. Hennessy, M.M. Shulaker, M. Messana, A.B. Graham, N. Klejwa, J Provine, T.W. Kenny, R.T. Howe, “Vacuum Encapsulated Resonators For Humidity Measurement”, SENSORS & ACTUATORS B – CHEMICAL, vol. 185, pp. 575-581, 2013.

R. Parsa, W.S. Lee, M. Shavezipur, J Provine, R. Maboudian, R.T. Howe, “Laterally Actuated Platinum-Coated Polysilicon Nanoelectromechanical Relays”, IEEE/ASME JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 22, pp. 768-778, 2013.

G. Shambat, S.R. Kothapalli, J Provine, T. Sarmiento, J. Harris, S.S. Gambhir, J. Vuckovic, “Single-Cell Photonic Nanocavity Probes”, NANOLETTERS, vol. 13, pp. 4999-5005, 2013.

S. Yoneoka, J. Lee, M. Liger, G. Yama, T. Kodama, M. Gunji, J Provine, R.T. Howe, K.E. Goodson, T.W. Kenny, “Electrical and Thermal Conduction in ALD Nanobridges Down To 7-nm Thickness”, NANOLETTERS, vol. 12, pp. 683-686, 2012.

J.-W.P. Chen, J Provine, N. Klejwa, R.T. Howe, “Dry Wafer Reconstitution Process with Zero Insertion Force by Embedded Alignment Guide Tabs”, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, 2012.

G. Shambat, S.R. Kothapalli, A. Khurana, J Provine, K. Rivoire, K. Cheng, T. Sarimento, J. Harris, H. Daldrup-Link, S.S. Gambhir, J. Vuckovic, “A photonic crystal cavity-optical fiber tip nanoparticle sensor for biomedical applications”, APPLIED PHYSICS LETTERS, vol. 100, 2012.

S. Sedky, H. Tawfik, M. Ashour, A.B. Graham, J Provine, Q. Wang, X.X. Zhang, R.T. Howe, “Microencapsulation of Silicon Cavities Using Pulsed Excimer Laser”, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, 2012.

K.-H. Paik, Y. Liu, V. Tabard-Cossa, M. J. Waugh, D.E. Huber, J Provine, R.T. Howe, R.W. Dutton, R.W. Davis, “Control of DNA Capture by Nanofluidic Transistor”, ACS NANO, vol. 6, pp. 6767-6775, 2012.

D. Elata, V. Leus, J Provine, A. Hirshberg, R.T. Howe, “On The Electromechanical Response of Electrostatic Actuators That Are Driven by both Voltage and Charge”, IEEE/ASME JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 20, pp. 150-156, 2011.

M.M. Shulaker, H. Wei, N. Patil, J Provine, H-Y Chen, H.-S.P. Wong, S. Mitra, “Linearly Scaled Carbon Nanotube Density and CNFET Current Enabled Through Multiple Transfer Technique”, NANOLETTERS, vol. 11, pp. 1881-1886, 2011.

I.W. Jung, B. Park, J Provine, R.T. Howe, O. Solgaard, “Highly Sensitive Monolithic Silicon Photonic Crystal Fiber Tip Sensor for Simultaneous Measurement of Refractive Index and Temperature”, IEEE/OSA JOURNAL OF LIGHTWAVE TECHNOLOGY, vol. 29, pp. 1367-1374, 2011.

S.B. Mallick, I.W. Jung, A.M. Meisner, J Provine, R.T. Howe, O. Solgaard, “Multilayered Monolithic Silicon Photonic Crystals”, IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 23, 2011.

B. Park, J Provine, I.W. Jung, R.T. Howe, O. Solgaard, “Photonic Cyrstal Fiber Tip Sensor for High Temperature Measurement”, IEEE SENSORS JOURNAL, vol. 11, pp. 2643-2648, 2011.

S.R. Broderick, C. Suh, J Provine, C.S. Roper, R. Maboudian, R.T. Howe, K. Rajan, “Application of Principal Component Analysis to a Ful Profile Correlative Analysis of FTIR Spectra”, SURFACE AND INTERFACE ANALYSIS, 2011.

G. Shambat, J Provine, K. Rivoire, T. Sarmiento, J. Harris, J. Vuckovic, “Optical Fiber Tips Functionalized with Semiconductor Photonic Crystal Cavities”, APPLIED PHYSICS LETTERS, vol. 99, 2011.

M. Messana, A. Graham, P.Hartwell, J Provine, S. Yoneoka, R. Melamud, B. Kim, R.T. Howe, T.W. Kenny, “A Method for Wafer Scale Encapsulation of Large Lateral Deflection MEMS Devices”, IEEE/ASME JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 19, pp. 28-37, 2010.

S. Yoneoka, C. Roper, R. Candler, S. Chandorkar, A Graham, J Provine, R. Maboudian, R. Howe, T. Kenny, “Characterization of Encapsulated MEMS Resonators Sealed and Clad with Polycrystalline SiC”, IEEE/ASME JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 19, pp. 1-10, 2010.

N. Klejwa, R. Misra, J Provine, S.J. Klejwa, R.T. Howe, “Laser Print Patterning of Planar Spiral Inductors and Interdigitated Capacitors”, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, vol. 27, pp. 2745-2749, 2009.

R. Kant, N. Ferralis, J Provine, R.T. Howe, R. Maboudian, “Micro-scale silicon migration in high temperature, low pressure, inert ambient”, ELECTROCHEMICAL AND SOLID-STATE LETTERS , vol. 12, pp. 437-440, 2009.

J.L. Skinner, L.L. Hunter, A.A. Talin, J Provine, D.A. Horsley, “Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography”, IEEE TRANSACTIONS ON NANOTECHNOLOGY, vol. 7, pp. 527-531, 2008.

J Provine, Jack Skinner, David A. Horsley, “Tunable Subwavelength Metal Gratings In the Mid-IR Band”, IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, vol. 13, pp. 270-276, 2007.